Learn how 4D digital holographic microscopy provides real-time, non-contact measurement of MEMS micromirror deformation, ...
A recently granted patent (Publication Number: US12007556B2) discloses a light deflection device that includes a mirror unit controlled by two piezoelectric actuators to enable movement around ...
This article appeared in Laser Focus World and has been published here with permission. This article is part of the TechXchange: LiDAR Technology. A microelectromechanical systems (MEMS) mirror’s ...
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